Microfluidics Manufacturing: What is Photolitography?

Posted By J. García / Technology Blog / Lab on a Chip, microfluidic chip, microfluidics / No hay comentarios

Photolitography process in microfluidics

MASK ALIGNER: Photolitography process in microfluidics

Microfluidics Manufacturing: Photolitography technique

Photolitography is manufacturing process commonly used in microfluidics.

When it comes to  challenging microfluidic arquitectures such as interdigitated electrodes(<10µ), high aspect ratio channels and small features this is a much more precise technique for the fabrication. It  uses UV light to transfer a geometric pattern from a Cromium (<10µ) or acetate(>10µ) photomask with very high dimensional resolution

This manufacturing process can transfer these patterned structures to a wafer made of Silicon, Quartz, Glass, Polymers or even Metals.

The alignment of the photomask is a crucial process and is done with a mask aligner for accurate results.

The photolitography, when using the light, only allows to create rectangular or square channels, as the “attack” comes from the upper side and is straight(90º).

Also is used for manufacturing of molds for PDMS casting or hot embossing.

 

 

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